G09000 - SEMI G90 - Specification for 300 mm Wafer Coin-Stack Type Shipping Container Used for Test and Packaging Processes Revision:SEMI G90-0811 (Reapproved 0318) - Superseded A surface area per mass

A surface area per mass value is then calculated using the appropriate formula and the measured values

SEMI M50-1101 (first published)

2-0698 (Reapproved 0615)

This test procedure evaluates quantitatively the durability of flat panel display (FPD) glass substrates using reagents employed in FPD production processes

This Standard specifies the requirements for wafer spacers used for separation of wafers and for a cushion material used for wafer protection

G09000 - SEMI G90 - Specification for 300 mm Wafer Coin-Stack Type Shipping Container Used for Test and Packaging Processes Revision:SEMI G90-0811 (Reapproved 0318) - Superseded A surface area per massThe purpose of this Standard is to standardize the specifications for 300 mm wafer coin stack type shipping container used for test and packaging processes for wafers. This Specification defines the dimensions of container (refer to 5. 1. 1) and requirements for securing the interface between container and processing equipment or wafer transportation equipment. This Standard specifies the requirements for wafer spacers used for separation of wafers